Abstract: In this review article, various aspects of plasma etching for very large scale integrated (VLSI) circuit technology are presented. The motivation for using plasma etching and the advantages ...

UDRI's Metallography Laboratory possesses equipment enabling our researchers to section, grind, polish, etch and optically characterize metallic ... projects and provides rapid turnaround times for ...

The cut specimens were ground in a crisscross pattern with abrasive papers of different particle sizes and then mechanically polished. Metallographic specimens were prepared by chemical etching with 6 ...