Abstract: An extensive evaluation program has been carried out on newly developed tantalum nitride thin film resistors that were specifically prepared for this purpose and which included several ...

Abstract: A study of the thermal oxidation of tantalum nitride (Ta-N) thin films has led to the development of a thermal processing technique by which these metal films can be made to exhibit superior ...

potentially replacing current tantalum and tantalum nitride layers. This innovation could create more space for copper wires, significantly reducing resistance and thereby boosting microchip speed.