Based on solid-state piezo drives ... Closed-loop control with feedback sensors provides excellent repeatability and accuracy. The S-335 two-axis tip-tilt mirror can provide 35mrad of mechanical ...

The hysteresis is less than a nanometer. Ordinary piezoelectric translators are non-linear and exhibit hysteresis and creep. To overcome these deficiencies a position sensor is built into each DPT.

actuator is a piezoelectric multi-morphic thin film actuator that can move at Z-axis and tip-tilt directions to achieve a 3-axis compensation. The MEMS devices are designed to be based on standard ...